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Demonstration of high-Q TE-TM photonic crystal nanobeam cavities
high-Q TE-TM photonic crystal nanobeam cavities Physics
2010/11/16
We experimentally demonstrate high Quality factor dual-polarized TE-TM photonic crystal nanobeam cavities. The free-standing nanobeams are fabricated in a 500 nm thick silicon layer, and are probed u...