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Microlens Array Fabricated by Excimer Laser Micromachining with Gray-tone Photolithography
excimer laser gray-tone photolithography SIL
2011/11/28
We demonstrate the fabrication of a refractive microlens array by using 248 nm excimer laser micromachining with coded gray-tone mask photolithography. With pre-corrections to the nonlinear exposure p...
Nanomechanical properties of silicon surfaces nanostructured by excimer laser
Nanomechanical properties silicon surfaces nanostructured excimer laser
2010/10/12
Excimer laser irradiation at ambient temperature has been employed to produce nanostructured silicon surfaces. Nanoindentation was used to investigate the nanomechanical properties of the deformed sur...
Improvement of the Total Efficiency of KrF Excimer Laser with Shoter Pulsed-Power Supply
Excimer laser Pulsed-power supply Pulse width Efficiency
2009/6/9
We did experiments and consideration of the relation between the pulse width of the pulsed-power supply output and KrF excimer laser efficiency. The breakdown voltage rises when the pulse width is dec...
Preparation of Organic Semiconductive Thin Films by Excimer Laser Ablation and Their Application to Energy Conversion and Storage
Excimer laser ablation Polyperinaphthalene Heterojunction
2009/6/9
Excimer laser ablation (ELA) of 3, 4, 9, 10-perylenetetracarboxylic dianhydride (PTCDA) targets enables us to obtain organic thin films with various electronic/electric properties with minute control ...
The application of excimer laser to polyethylene-terephthalate fiber (PET) and aramid fiber is investigated, from a viewpoint of “ablation”. First, the ablation mechanism of these fibers were revealed...
Recent Trends and Developments in Excimer Laser Ablation for Medical Applications
Cornea Collagen Excimer laser ablation
2009/6/9
The ArF excimer laser ablates the cornea and other tissue with micrometer-size precision and minimal residual thermal damage. However, there is still no clear picture regarding the mechanisms for the ...
Study of the pulsed laser vapor doping of the Si (100) with KrF excimer laser and BCl3 gas
2007/7/28
期刊信息
篇名
Study of the pulsed laser vapor doping of the Si (100) with KrF excimer laser and BCl3 gas
语种
中文
撰写或编译
撰写
作者
Wei Lin Shi,Xiying Ma
第一作者单位
绍兴文理学院
刊物名称
Applied Surface Science
页面
Vol. 230, 44–49...