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Preface to Topical Papers on Crystallization of Silicon Using Laser Annealing and Its Application to Electronic Device Fabrication
Silicon Laser Annealing Electronic Device Fabrication
2009/6/9
Preface to Topical Papers on Crystallization of Silicon Using Laser Annealing and Its Application to Electronic Device Fabrication.
High Pulse-Energy Green Laser for Laser Annealing System by LD-pumped Nd:YAG Laser
Intra-cavity Annealing SHG LD-pumped
2009/6/1
Recently, we have demonstrated high average-power SHG generation by LD-pumped kHz-class pulsed Nd:YAG laser. Using this technique, we have developed a green laser for the YAG Laser Annealing System. W...
Stress modification in gold metal thin films during thermal annealing
thin films annealing strain stress
2011/5/10
Stress evolution during deposition of 50 nm Au thin films by thermal evaporation in a UHV system and then stress modification during thermal vacuum annealing have been performed. For stress measuremen...
Effect of annealing temperature on the morphology of ohmic contact Ti/Al/Ni/Au to n-AlGaN/GaN heterostructures
ohmic contacts heterostructure AlGaN/GaN heterostructure
2011/5/10
Ohmic contacts to AlGaN/GaN heterostructures which have low contact resistance and good surface morphology are required for the development of high temperature, high power and high frequency electron...
Effect of pulse CO2 laser annealing on the crystallization of Er3+ doped Al2O3 thin film to a silica-on-silicon substrate
Laser annealing Alumina thin film Photoluminescence spectrum
2011/12/7
We analyze the effect of the laser annealing on the crystallization of Er3+ doped amorphous Al2O3 thin films deposited on the silica-on-silicon substrate. These thin films were prepared by the microwa...
Vacuum annealing effects on properties of ITO films prepared by reactive low voltage ion plating technique
ITO film RLVIP Annealing Infrared reflectance Optical transmittance Sheet Resistance
2011/12/7
With reactive low voltage ion plating technique, ITO (indium oxide doped with tin) films were deposited on glass substrates by using ITO pellet with a composition of 90 wt.% 1n203 and 10 wt.% Sn02 wit...
期刊信息
篇名
Annealing effect on electrical properties of high-k MgZnO film on silicon
语种
英文
撰写或编译
作者
Liang J,Wu HZ(吴惠桢),Chen NB,Xu TN
第一作者单位
刊物名称
Semiconductor Science and Technology
页面
20, L1-L5 2005 (校样...
Influence of post annealing on optical and structural properties of Eu and Pd-doped TiO2 thin films
transparent oxide semiconductor
2011/5/3
This work presents optical and structural characterization of europium and palladium doped titanium dioxide thin films prepared by modified magnetron sputtering. The metallic Eu and Pd dopants have be...
Influence of aging and annealing on the properties of silica films produced with sol-gel method
sol-gel silica film
2011/5/3
The paper presents the results of investigations involving the influence of aging and annealing of the sol films on the final parameters of the obtained silica films. Both technological process and me...
Influence of high pressure annealing on electrical properties of surface layer of neutron irradiated or germanium-doped Czochralski-grown silicon
germanium-doped silicon neutron-irradiated silicon defects
2011/4/27
The effect of annealing at 720–920 K under enhanced pressure (up to 1.1 GPa) in argon ambient on electrical properties of the surface layer of the Czochralski-grown silicon (Cz-Si) subjected to neutro...
Opto structural effects of annealing of Nylon 66 fibers
orientation crystallinity annealing Nylon 66 skin-core interferometry
2011/4/25
Multiple-beam Fizeau fringes are used to study the changes in optical parameters of annealed Nylon 66 fibers. Changes in the refractive indices and birefringence of skin and core have been measured in...