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Modeling of the Atomic Processes and Photo Emission of the Plasmas for the EUV Source
Laser produced plasmas EUV Atomic process
2009/6/1
A study of the coefficient of radiative transfer of Sn plasmas for the extreme ultra-violet (EUV) light source is presented. The atomic data of near 10 times ionized Sn ions are calculated using the H...
massachusetts institute of technology model simulates atomic processes in nanomaterials
computer modeling Materials
2007/3/5