搜索结果: 1-5 共查到“半导体物理学 temperature”相关记录5条 . 查询时间(0.225 秒)
Improvement of temperature uniformity in rapid thermal processing systems using multivariable control
Temperature uniformity rapid heat treatment system a semiconductor chip the chip temperature distribution the chip
2015/8/12
During rapid thermal processing (RTP) of a semiconductor wafer, maintenance of near-uniform wafer temperature distribution is necessary. This paper addresses the problem of insuring temperature unifor...
Multivariable feedback control of semiconductor wafer temperature
Multivariate semiconductor chip temperature temperature control chip rapid heat treatment semiconductor chips sensors
2015/8/12
The authors consider the problem of wafer temperature control in rapid thermal processing (RTP) of semiconductor wafers. They present a novel approach to the analysis of candidate sensor configuration...
Comparison of some theoretical models for fittings of the temperature dependence of the fundamental energy gap in GaAs
Non-linear behavior of Eg(T) Zero-point energy Temperature dependence of the gap Gallium arsenide
2010/6/30
In this work we report on a comparison of some theoretical models usually used to fit the dependence on temperature of the fundamental energy gap of semiconductor materials. We used in our investigati...
Characterization of Cd1−xFexS diluted magnetic semiconductors grown at near phase conversion temperature
A. Cd1− xFexS D. Phase conversion D. Van Vleck-type paramagnetism
2011/12/8
Fe-based cadmium sulfide alloy thin films have been grown on c-plane sapphire substrates by a low-pressure metalorganic chemical vapor deposition technique at different growth temperatures. From X-ray...
Effects of Substrate Temperature on Properties of a-SiNx:H Films
A. Hydrogenated amorphous silicon nitride B. Substrate temperature C. Dark conductivity D. Photoconductivity E. Optical gap
2010/4/13
Hydrogenated amorphous silicon nitride films were prepared in an rf glow-discharge system by the decomposition of silane + nitrogen gas mixture at various substrate temperatures. The effects of substr...